Study of the Sensor Properties of Ordered ZnO Nanorod Arrays for the Detection of UV Radiation

M. V. Evstafieva; Евстафьева М. В.; M. A. Knyazev; Князев М. А.; V. I. Korepanov; Корепанов В. И.; A. N. Red’kin; Редькин А. Н.; D. V. Roschupkin; Рощупкин Д. В.; E. E. Yakimov; Якимов Е. Е.

doi:10.31857/S0544126923700436

Study of the Sensor Properties of Ordered ZnO Nanorod Arrays for the Detection of UV Radiation

Authors: Evstafieva M.V.¹, Knyazev M.A.¹, Korepanov V.I.¹, Red’kin A.N.¹, Roschupkin D.V.¹, Yakimov E.E.¹
Affiliations:
1. Institute of Problems of Microelectronics Technology and High-Purity Materials, Russian Academy of Sciences
Issue: Vol 52, No 4 (2023)
Pages: 322-328
Section: СЕНСОРЫ
URL: https://journal-vniispk.ru/0544-1269/article/view/138577
DOI: https://doi.org/10.31857/S0544126923700436
EDN: https://elibrary.ru/HZVUIQ
ID: 138577

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Abstract
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Abstract

Zinc oxide is one of the most promising materials used to create devices in the ultraviolet (UV) range. In this article, we study the sensor properties of ordered ZnO nanorod arrays grown by chemical vapor deposition. The possibility of their use as an indicator of UV radiation to control the dose of UV radiation, both from natural and artificial light sources, is assessed. The X-ray diffraction, Raman spectroscopy (RS), and cathodoluminescence (CL) data demonstrate the high quality of nanorods. Based on the ZnO nanorod array, a sensor prototype was fabricated based on the change in ZnO conductivity under the UV irradiation. A compari-son of the response of such a sensor with the readings of a UV radiometer showed a high correlation.

Keywords

ZnO nanorod arrays, wide-gap semiconductor, sensor properties, UV detectors, photosensitivity

References

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