电邮这篇文章 Development of the Ge-MDST instrument structure with an induced p-type channel
- 作者: Alyabina N.A.1, Arkhipova E.A.2, Buzynin Y.N.1,2, Denisov S.A.1, Zdoroveishchev A.V.1, Titova A.M.1, Chalkov V.Y.1, Shengurov V.G.1
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隶属关系:
- Nizhegorodsky State University named after N.I. Lobachevsky
- Institute of Microstructure Physics of the Russian Academy of Sciences
- 期: 卷 53, 编号 3 (2024)
- 页面: 259-264
- 栏目: ПРИБОРЫ
- URL: https://journal-vniispk.ru/0544-1269/article/view/267570
- DOI: https://doi.org/10.31857/S0544126924030077
- ID: 267570
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详细
The conditions for the growth of n-type Ge conduction layers by the HW CVD method with the parameters required to create a Ge-TIR transistor with an induced p-type channel are determined. The conditions of deposition by electron beam deposition and subsequent annealing of layers of a high-k dielectric ZrO2:Y2O3 are optimized, allowing to achieve a leakage current of 5 × 10–6 A/cm2. For the developed instrument structure, some parameters of the Ge-TIR transistor were calculated, such as the channel length, the maximum voltage between the drain and the source, and the breakdown voltage.
作者简介
N. Alyabina
Nizhegorodsky State University named after N.I. Lobachevsky
Email: asya_titova95@mail.ru
俄罗斯联邦, Nizhny Novgorod
E. Arkhipova
Institute of Microstructure Physics of the Russian Academy of Sciences
Email: asya_titova95@mail.ru
俄罗斯联邦, Afonino
Yu. Buzynin
Nizhegorodsky State University named after N.I. Lobachevsky; Institute of Microstructure Physics of the Russian Academy of Sciences
Email: asya_titova95@mail.ru
俄罗斯联邦, Nizhny Novgorod; Afonino
S. Denisov
Nizhegorodsky State University named after N.I. Lobachevsky
Email: asya_titova95@mail.ru
俄罗斯联邦, Nizhny Novgorod
A. Zdoroveishchev
Nizhegorodsky State University named after N.I. Lobachevsky
Email: asya_titova95@mail.ru
俄罗斯联邦, Nizhny Novgorod
A. Titova
Nizhegorodsky State University named after N.I. Lobachevsky
编辑信件的主要联系方式.
Email: asya_titova95@mail.ru
俄罗斯联邦, Nizhny Novgorod
V. Chalkov
Nizhegorodsky State University named after N.I. Lobachevsky
Email: asya_titova95@mail.ru
俄罗斯联邦, Nizhny Novgorod
V. Shengurov
Nizhegorodsky State University named after N.I. Lobachevsky
Email: shengurov@phys.unn.ru
俄罗斯联邦, Nizhny Novgorod
参考
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