Electrochemical Deposition of Permalloy Films for Magneto-Semiconductor Microsystems

Resumo

The results of investigating local electrochemical deposition from a chloride electrolyte are presented. Ni₈₁Fe₁₉ permalloy films with magnetic properties similar to those of 3D samples with a uniform thickness and low mechanical stresses without high-temperature annealing are obtained. The dependences of the rate of congruent deposition of the permalloy on the current density are presented.